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中科飞测核心专利布局.json
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中科飞测核心专利布局.json
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{
"name": "中科飞测",
"children": [
{
"name": "深紫外成像扫描技术",
"children": [
{"name": "CN103018258B", "value": 1},
{"name": "CN102759533A", "value": 1}
]
},
{
"name": "高精度多模式干涉量测",
"children": [
{"name": "CN113624156A", "value": 1}
]
},
{
"name": "基于参考区域对比的缺陷识别算法",
"children": [
{"name": "CN111667448B", "value": 1},
{"name": "CN112767396B", "value": 1}
]
},
{
"name": "晶圆正边背全维度检测",
"children": [
{"name": "CN217277934U", "value": 1},
{"name": "CN217156336U", "value": 1},
{"name": "CN114062382A", "value": 1}
]
},
{
"name": "高深宽比结构的膜厚量测",
"children": [
{"name": "CN109540005B", "value": 1},
{"name": "CN109540004A", "value": 1}
]
},
{
"name": "高速目标定位和量测路径规划",
"children": [
{"name": "CN215525579U", "value": 1},
{"name": "CN115561255A", "value": 1}
]
},
{
"name": "光谱共聚焦多视角拼接三维重构",
"children": [
{"name": "CN111623723B", "value": 1},
{"name": "CN114299049A", "value": 1}
]
}]
}